| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor of which properties such as sensitivity hardly change to disturbing forces added to a sensor chip. <P>SOLUTION: The acceleration sensor has a supporting frame; a weight part supported in the supporting frame via flexible beam parts; semiconductor piezoresistive elements provided in the beam parts; and wiring for connecting them. The acceleration sensor detects acceleration on the basis of changes in the resistance of the piezoresistive elements. Stress buffering parts are formed in the beam parts except parts in which the piezoresistive elements are formed. The stress buffering parts are formed at approximately center parts of the beam part. Even if disturbing forces are added to a sensor element in the longitudinal directions of the beam parts, the stress buffering parts absorbs the disturbing forces. Since stress in the longitudinal directions of the beam parts hardly changes, the shape changeability of beams hardly changes to reduce sensitivity changes due to the effects of disturbing forces. <P>COPYRIGHT: (C)2009,JPO&INPIT |
