| 摘要 |
PROBLEM TO BE SOLVED: To provide a single aspherical common optical element exposure machine lens set which simplifies tuning factors of an optical system, achieves the functions of an exposure lens easily, reduces manufacturing costs, allows an optical member to be easily fabricated using a small number of elements, and which achieves aberration resistance, excellent numerical aperture ratio and cost reduction with simple calibration.SOLUTION: The single aspherical common optical element exposure machine lens set includes: a common optical element set composed of first to third lenses 11-13 sequentially arranged; and a plane reflection lens set 30 including a spherical mirror 20 arranged below the third lens 13 and first and second plane reflection mirrors 31, 32 respectively arranged obliquely above the first lens 11. Each optical lens set forms an equal-magnification exposure machine lens set, and a pattern on an apparatus 1 is focused by each optical lens set and then projected onto a photosensitive surface (wafer) 2.SELECTED DRAWING: Figure 1 |
