发明名称 SOLID STATE IMAGE PICKUP DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a solid state image pickup device that is highly reliable even when film stress is generated by an in-layer lens forming material such as a silicon nitride film and an oxide silicon nitride film.SOLUTION: The solid state image pickup device includes: a first area, in which a plurality of pixels is disposed; a second area, provided at more peripheral side than the first area; and a third area, provided at more peripheral side than the second area. In-layer lens layers provided in these areas have openings. Insulating layers formed under the in-layer lens layers are also provided with openings.SELECTED DRAWING: Figure 2
申请公布号 JP2016219468(A) 申请公布日期 2016.12.22
申请号 JP20150099485 申请日期 2015.05.14
申请人 CANON INC 发明人 TAMAKI JUNYA;SHIKAMI ATSUSHI;KITAMURA SHINGO;TOYODA TAKEHIRO;KURIHARA MASAKI
分类号 H01L27/14 主分类号 H01L27/14
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