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发明名称
SURFACE TREATMENT AND METHOD FOR REGENERATING ETCHANT
摘要
申请公布号
JPH0762565(A)
申请公布日期
1995.03.07
申请号
JP19930212554
申请日期
1993.08.27
申请人
MITSUBISHI HEAVY IND LTD
发明人
KAMIHATA TAKAFUMI
分类号
C23F1/20;C23F1/46;(IPC1-7):C23F1/46
主分类号
C23F1/20
代理机构
代理人
主权项
地址
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