METHOD FOR MANUFACTURING GLASS CLICHE USING LASER ETCHING AND APPARATUS FOR LASER IRRADIATION THEREOF

摘要

A manufacturing method of glass substrates using the laser etching and laser irradiation apparatus therefore are provided to harmoniously use the wet etching and laser etching and to improve aspect ratio and work efficiency. A laser light source part(308) irradiates laser. An input unit(302) receives topology data to be formed of a pattern. An operation unit(304) computes the area information of the laser illumination surface corresponding to topology data. A controller(306) controls the laser light source part so that the laser be irradiated. The irradiated laser has the differential illumination area based on the computed area information according to the progress of the scanning time.