| 摘要 |
<p>An apparatus of forming the alignment mark is provided to use the positioning pin and to easily determine the location of pattern in both sides of substrate without forming the penetration. The apparatus(10) of forming the alignment MARK comprises the table(11), the three positioning pins(21), and alignment MARK shaping sections(51a,51b,51c) and inclined three plates(12). Positioning pins determine the location of substrate on the table. The alignment MARK shaping section comprises the light exposed part of the pair on the same axle. A pair of light exposed part are positioned in the front surface side and backside of substrate. The UV light is irradiated through a pair of light exposed part in the non valid area of substrate. The alignment MARK is formed.</p> |
