| 摘要 |
A high frequency power supply includes a DC source unit ( 19 ) that outputs a DC voltage Vdc having an output level corresponding to a target voltage, an oscillation unit ( 13 ) that outputs a high frequency voltage signal having an output level corresponding to a target power, an amplification unit ( 14 ) that includes a plurality of amplifying elements, and amplifies and outputs the high frequency voltage signal output by the oscillation unit ( 13 ) utilizing the DC voltage output by the DC source unit ( 19 ), an output voltage detection unit ( 21 ) that detects an amplitude of the voltage between the amplified-side terminals of the amplifying elements in the amplification unit ( 14 ), or an amplitude of a voltage that is proportional to the amplitude of the voltage between the amplified-side terminals, and a target voltage decision unit ( 22 ) that decides a target value of the DC source voltage Vdc to be outputted by the DC source unit ( 19 ) based on the detection result from the output voltage detection unit ( 21 ).
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