发明名称 |
MEMS DEVICE WITH NANOWIRE STANDOFF LAYER |
摘要 |
A microelectromechanical systems (MEMS) device and related methods are described. The MEMS device comprises a first member having a first surface and a second member having a second surface, the first and second surfaces being separated by a gap that is closable by a MEMS actuation force applied to at least one of the first and second members. A standoff layer is disposed on the first surface of the first member, the standoff layer providing standoff between the first and second surfaces upon a closing of the gap by the MEMS actuation force. The standoff layer comprises a plurality of nanowires that are anchored to the first surface of the first member and that extend outward therefrom.
|
申请公布号 |
US2009027763(A1) |
申请公布日期 |
2009.01.29 |
申请号 |
US20070881076 |
申请日期 |
2007.07.24 |
申请人 |
ZHANG WENHUA;WU WEI;WANG SHIH-YUAN |
发明人 |
ZHANG WENHUA;WU WEI;WANG SHIH-YUAN |
分类号 |
G02F1/29;H01L41/09;H01L41/22 |
主分类号 |
G02F1/29 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|