| 摘要 |
PROBLEM TO BE SOLVED: To provide a marking inspection device capable of shortening the measuring time, and measuring the depth of a marked character formed with a V-groove shape or a U-groove shape, and having less influence on measurement accuracy, even with a mirror-reflecting marked surface. SOLUTION: Laser slit light sources 41-45 are supported on a moving stage 72 of a scanning unit 71 and can be moved in the Y-direction 73. Irradiation position of a slit light 31 from each laser slit light source 41-45 is imaged from the oblique upside by a corresponding CCD camera 81-85. The relation between each laser slit light source 41-45 and each CCD camera 81-85 is set so that regularly reflected light 91 of the slit light 31, reflected regularly by the marked plane 2, is not input directly into the corresponding CCD camera 81-85. An image acquired by each of CCD cameras 81-85 is analyzed by a control device 101. COPYRIGHT: (C)2009,JPO&INPIT
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