| 摘要 |
Provided is an inspection method for a substrate having components loaded thereon, the inspection method being capable of determining, by using a common configuration without a separate configuration or a change of inspection conditions, whether the loaded state of the components is good or bad. The inspection method comprises the steps of: acquiring a three-dimensional shape by projecting a grating image toward the substrate through at least one lighting unit, photographing the image reflected through an image photographing unit, transferring the grating image, and photographing the grating image again; extracting a shield region from the three-dimensional shape; extracting a shield-removed three-dimensional shape except for the shield region in the three-dimensional shape; and inspecting loading defects of the components by using the shield-removed three-dimensional shape. |
