A RADIATION SYSTEM AND METHOD

摘要

A radiation system for generating a radiation emitting plasma comprises a fuel emitter (3) configured to provide fuel (70) to a plasma formation region (4), a laser (1) arranged to provide a laser beam (2) at the plasma formation region incident on the fuel to generate a radiation emitting plasma (7), and an imaging device (10) arranged to obtain at least one image of an imaging region, the image indicating at least one property of the fuel and/or the radiation emitting plasma and/or debris. The imaging region is located between the fuel emitter and the plasma formation region, or the imaging region is located between the plasma formation region and a further component of the radiation system. The system further comprises a controller (11) configured to process the at least one image and to provide an instruction in dependence on said at least one property of the fuel and/or the radiation emitting plasma and/or debris.