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发明名称
FORMATION OF FILM
摘要
申请公布号
JPH05132757(A)
申请公布日期
1993.05.28
申请号
JP19910326363
申请日期
1991.11.13
申请人
NISSIN ELECTRIC CO LTD
发明人
NISHIYAMA SATORU;OGATA KIYOSHI;EBE AKINORI;KURATANI NAOTO
分类号
C23C14/22
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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