发明名称 POSITIONING EQUIPMENT OF CASSETTE FOR THIN TYPE SUBSTRATE
摘要 <p>PURPOSE: To provide a cassette positioning equipment wherein, when a cassette accommodating a thin type substrate is positioned in a cassette station, the adjustment for positioning is very simply enabled, and the cost also can be reduced. CONSTITUTION: The title cassette positioning equipment consists of the following; a cassette base 6 on which a cassette 10 is mounted, a roller base 3 for sliding the cassette base 6, a stopper 4 for positioning the cassette 10, a clamper 5 for clamping the cassette 10, and a spring means which returns the cassette base to the constant position. The spring means is provided with a wire 7 made of spring steel. One end of the wire 7 is connected with the cassette base 6, and the other end is connected with a trestle 2. The wire 7 has energizing force in the direction rectangular to the direction stretching from the trestle to the cassette base.</p>
申请公布号 JPH08321541(A) 申请公布日期 1996.12.03
申请号 JP19950126653 申请日期 1995.05.25
申请人 METSUKUSU:KK 发明人 KIRIHATA TADASHI
分类号 B23P19/00;H01L21/673;H01L21/68;(IPC1-7):H01L21/68 主分类号 B23P19/00
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