| 摘要 |
PROBLEM TO BE SOLVED: To provide a film, which has transparency, and can shield harmful ultraviolet light and infrared rays by laminating a diamond carbon film, where hydrogen concentration is specific atomic % or lower, and oxygen concentration is specific atomic &or lower, on at least one side of a multi-layer laminated film having selective transmission properties. SOLUTION: A base film is laminated on a Si wafer for placing on a cooling plate 7 in a vacuum vessel 1. When a specified degree of vacuum is reached using a vacuum pump, raw gas is introduced from a gas introducing pipe 8, and high frequency is applied to generate plasma for forming a film. The Si wafer is cooled through the cooling plate 7. Oxygen atoms are appropriately contained in the film to improve transparency without deteriorating gas barrier properties of the film. That is, hydrogen concentration contained in a diamond carbon film acts as a barrier layer against water vapor and oxygen is 50 atomic % or lower, preferably 45 atomic % or lower, and oxygen concentration contained in the film is 2-20 atomic %, preferably 2-15 atomic %.
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