| 摘要 |
PROBLEM TO BE SOLVED: To effectively avoid interference between an optical system unit and a mobile object. SOLUTION: A stroke limit which limits the movable range of at least one of a holding member 38 holding an optical system unit PU and a base 71 disposed below the optical system unit PU, and a stroke limit which limits the movable range of a mobile object WTB which has a photosensitive object W mounted and can move along an upper surface of the base and can move in a prescribed stroke range also in a gravity direction, are set according to sequence by a control device 20 which controls anti-vibration parts (56, 66) supporting at least one of a driving system 27 which drives the mobile object, the holding member and the base to a floor surface F to move along the gravity direction in the prescribed stroke range. In the control device, the stroke limit of at least one of the holding member, the base and the movement body is reset every sequence. COPYRIGHT: (C)2005,JPO&NCIPI
|
