| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dual-axis detection type angular velocity sensor which facilitates size reduction, enhancement of the orthogonality of turning-fork shaped crystal pieces, and moreover, which is economical. <P>SOLUTION: The angular velocity sensor includes turning-fork shaped crystal piece1 1 for detecting the electric charge due to the Coriolis force, an IC chip 2 electrically connected therewith, and a recessed container body 3 having the IC chip 2 fixed to an internal bottom surface, having the base of the crystal piece 1 fixed to the inner wall side step and having a turning fork arm extending over the IC chip 2. The IC chip 1 has an oscillation circuit, an amplitude limiting circuit, an angular velocity detection circuit, a reference voltage generating circuit and an adjustment mechanism for switching and controlling the output voltage of the angular velocity detecting circuit and the reference voltage of the reference voltage generating circuit by a written signal from the outside. Two crystal pieces 1 are used, where the two pieces 1 have the turning fork bases, fixed to the inner wall side steps that are different in height and are mutually orthogonal, and have the turning fork arms extend in directions that are mutually orthogonal. <P>COPYRIGHT: (C)2008,JPO&INPIT |
