ATMOSPHERIC PRESSURE PLASMA GENERATING AND IRRADIATING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an atmospheric plasma generating and irradiating device for irradiating low temperature plasma of high density over a large area in a short period of time with high working efficiency, and effectively introducing reaction gas.

SOLUTION: A high voltage application electrode 1-2 and earth electrode 1-1 are formed of two bulk-like metals processed so as to support a plurality of discharge tubes 2-2. Plasma flows 6 formed at the respective discharge tubes 2-2 are accumulated by corresponding to a shape of an irradiation object 8. A part of the high voltage application electrode 1-2 serves as a plasma injection nozzle, and a second fluid such as reaction gas to be mixed with primordial plasma is introduced from an inlet 7, and is mixed in an inside of the high voltage application electrode 1-2.

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