| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface reforming apparatus which can uniformly reform the surface of an object to be reformed without causing a large damage on the object. <P>SOLUTION: An electrical pulse causing streamer discharge without causing arc discharge is repeatedly applied to an electrode couple 111 provided in a space SP1 whereto an atmospheric gas mainly containing nitrogen gas is introduced. The surface W1s of an object W1 is reformed by compositionally applying a pulse electric field PE1 generated by the application of the electric pulse to the electrode couple 111, nitrogen radical NR1 contained in a plasma generated in the atmospheric gas by the streamer discharge, and short-wavelength ultraviolet rays UV1 generated from the atmospheric gas caused by the streamer discharge to a region to be reformed existing in the vicinity of the surface W1s of the object W1. <P>COPYRIGHT: (C)2008,JPO&INPIT |
