| 摘要 |
PROBLEM TO BE SOLVED: To perform accurate sample analysis simply and quickly without requiring treatment such as a high-temperature heat treatment for removing a contaminated component from a sample. SOLUTION: An opposite face to the sample 1 with which ions or the like scattered from the sample easily collide on the surface of a holder plate is coated with an insulating thin film 13. The coated portion is charged by the insulating thin film 13, to thereby have a potential different from the sample, and emission of secondary ions from a portion of the insulating thin film 13 is suppressed by a so-called charge-up phenomenon. COPYRIGHT: (C)2008,JPO&INPIT
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