| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact acceleration sensor capable of reducing current consumption and having high detection sensitivity and superior temperature characteristics. SOLUTION: The acceleration sensor 1 having a vibrating body 10 includes: a base 20 fixed to a pedestal; and an oscillating arm 21 extended from the base 20 in a beam-like shape, oscillating by bending vibration in a planer direction at a predetermined resonant frequency. The oscillating arm 21 includes: oscillating arm parts 23, 24 divided by a through-hole 22 penetrating in a lengthwise direction thereof at a central part in a width direction perpendicularly to a vibration direction; an additional mass part 25 having a mass equivalent to or larger than that of the base 20 connecting tip parts of the divided oscillating arm parts 23, 24; and excitation electrodes 31 to 34 provided to the oscillating arm parts. The oscillating arm 21 is supported by the base 20 and the additional mass part 25 with a pseudo both-end fixing structure, and resonant frequency variation of the vibrating body 10 by inertial effect of the additional mass part 25 when acceleration is applied thereto is detected. COPYRIGHT: (C)2008,JPO&INPIT
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