SEMICONDUCTOR SENSOR AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor sensor for spreading the range of fluid and flow rate to be measured, by preventing corrosion due to the penetration of fluid and damage due to the pressure of fluid. SOLUTION: The semiconductor sensor 1 includes at least a semiconductor substrate 2; a pressure-sensitive section 3 arranged on the semiconductor substrate; a through hole 4 arranged at least at one portion of the pressure-sensitive section; a first protective layer 6 and a second protective layer 7 arranged on both the surfaces of the pressure-sensitive section; and a third protective layer 8 arranged on the inner surface of the through hole. COPYRIGHT: (C)2008,JPO&INPIT