发明名称 ULTRASONIC CLEANING APPARATUS
摘要 An ultrasonic cleaning device in which variation in sound pressure is eliminated, that has an enhanced particle removal rate, and that has no uneven cleaning. These are achieved by emitting a uniform ultrasonic wave. The ultrasonic cleaning device has a cleaning tank for containing an article to be cleaned and a cleaning fluid, oscillation elements installed in the cleaning tank, oscillators connected to the oscillation elements and inducing oscillation of the oscillation elements, and a control part connected to the oscillators and controlling the oscillators so that the oscillators can output signals of the same or generally the same phase to the oscillation elements. ® KIPO & WIPO 2009
申请公布号 KR20080112225(A) 申请公布日期 2008.12.24
申请号 KR20087022205 申请日期 2007.09.10
申请人 KAIJO CORPORATION 发明人 HASEGAWA HIROSHI;KAMAMURA TOMOHARU
分类号 H01L21/302;B06B1/06;B08B3/12;H01L21/304 主分类号 H01L21/302
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