| 摘要 |
PROBLEM TO BE SOLVED: To provide a sputtering target constituted of split targets having different thicknesses from each other and capable of easily removing any bonding material from a space formed in adjacent parts of the split targets. SOLUTION: In the sputtering target, a target constituted of a plurality of split targets and a backing plate are integrally bonded with each other via a bonding material. The backing plate is formed in a substantially projecting-shaped section, and end split targets arranged at ends of the sputtering target out of the split targets are formed in a substantially L-shaped section, and other split targets than the end targets are formed in a flat shape. COPYRIGHT: (C)2009,JPO&INPIT
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