| 摘要 |
PROBLEM TO BE SOLVED: To provide a centrifugal force imparting device capable of accurately altering the posture of a chip and capable of determining the case that the obstruction such as the damage to a chip holding part is produced by achieving the simplification of a wiring structure. SOLUTION: The centrifugal force imparting device is equipped with two parts 26c and 26d to be detected provided at the different places of the outer periphery of the chip holding part 26 so as to be protruded in the rotary axis direction of the chip holding part 26 in a flange like state, a posture sensor 13 for irradiating the part 26c to be detected with a laser beam when the posture of a microchip 200 is present at a positive posture angle-of-rotation position and irradiating the part 26d to be detected with the laser beam when the posture of the microchip 200 is present at a left angle-of-rotation position at a posture detecting angle-of-rotation position and capable of receiving the reflected beams from both parts 26c and 26d to be detected, and a posture sensor 14 for irradiating the part 26c to be detected with a laser beam when the posture of the microchip 200 is present at a right posture angle-of-rotation position and irradiating the part 26d to be detected with the laser beam when the posture of the microchip 200 is present at the positive posture angle-of-rotation position at the posture detecting angle-of-rotation position and capable of receiving the reflected beams from the part 26c and 26d to be detected. COPYRIGHT: (C)2009,JPO&INPIT
|
