ELECTRODE AND METHOD FOR PRODUCING SAME

摘要

Provided is an electrode having a multilayer structure of the following: a first layer which comprises an Al film or an Al alloy film; and a second layer which comprises an amorphous Al nitride film in which the proportion of nitrogen atoms is 27-62 atom % and in which peaks derived from metallic Al or Al nitride are not detected when analyzing the crystalline state using an X-Ray diffraction apparatus.