发明名称 RASTERMIKROSKOP
摘要 The invention relates to a scanning microscope (100), comprising an objective (112) which focuses an illumination beam (102) at a specimen (115), a scanning element (104), which is arranged upstream of the objective (112) and which can be adjusted in order to deflect the illumination beam (102) in a time-varying manner in order to guide the focused illumination beam (102) across the specimen (115) in a scanning motion, and an image sensor (122), onto which the objective (112) focuses a detection beam (114) originating at the specimen (115) illuminated with the focused illumination beam (102). The image sensor (122) has a plurality of sensor elements (124) which can be individually read out by a controller (126) and across which the detection beam (114) is guided in a motion corresponding to the scanning motion of the focused illumination beam (102). A dispersive element (120) of predetermined dispersion effect is provided, which spatially separates different spectral components of the detection beam (114) from each other on the image sensor (122). The controller (126) senses the time-varying adjustment of the scanning element (104), assigns the spectral components of the detection beam (114) to the sensor elements (124) of the image sensor (122) in accordance with said adjustment while taking into account the predetermined dispersion effect of the dispersive element (120), and reads out the sensor elements (124) assigned to the respective spectral components.
申请公布号 LU92620(A1) 申请公布日期 2016.06.20
申请号 LU20140092620 申请日期 2014.12.19
申请人 发明人
分类号 G02B21/00 主分类号 G02B21/00
代理机构 代理人
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