发明名称 FIELD EFFECT TRANSISTOR STRUCTURES USING GERMANIUM NANOWIRES
摘要 Field effect transistor structures are described that are formed using germanium nanowires. In one example, the structure has a germanium nanowire formed on a substrate along a predetermined confinement orientation, a first doped region of the nanowire at a first end of the nanowire to define a source, a second doped region of the nanowire at a second end of the nanowire to define a drain, and a gate dielectric formed over the nanowire between the source and the drain.
申请公布号 WO2016105408(A1) 申请公布日期 2016.06.30
申请号 WO2014US72341 申请日期 2014.12.24
申请人 INTEL CORPORATION 发明人 KIM, RASEONG;AVCI, UYGAR;YOUNG, IAN
分类号 H01L29/772 主分类号 H01L29/772
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