Packaging substrate having embedded interposer and fabrication method thereof

摘要

A packaging substrate includes a carrier and an interposer. The carrier has opposite top and bottom surfaces. A recess is formed on the top surface and a plurality of first conductive terminals are formed on the recess. Further, a plurality of second conductive terminals are formed on the bottom surface of the carrier. The interposer is disposed in the recess and has opposite first and second surfaces and a plurality of conductive through vias penetrating the first and second surfaces. A first conductive pad is formed on an end of each of the conductive through vias exposed from the first surface, and a second conductive pad is formed on the other end of each of the conductive through vias exposed from the second surface and electrically connected to a corresponding one of the first conductive terminals. Compared with the prior art, the invention improves the product reliability.

主权项

1. A fabrication method of a packaging substrate having an embedded interposer, comprising the steps of:
preparing a multi-layer interconnect base plate having opposite third and fourth surfaces, wherein the third surface has a plurality of first conductive terminals disposed thereon; forming a built-up structure on the third surface of the multi-layer interconnect base plate; removing a portion of the built-up structure through a laser so as to form a cavity and expose the plurality of first conductive terminals from the cavity, thereby providing a carrier having opposite top and bottom surfaces, wherein the carrier comprises the multi-layer interconnect base plate and the built-up structure having a recess, the recess is formed on the top surface of the carrier and the plurality of first conductive terminals are formed on the recess, and a plurality of second conductive terminals are formed on the bottom surface of the carrier for electrically connecting the carrier and an external electronic device; and disposing in the recess an interposer having opposite first and second surfaces and a plurality of conductive through vias penetrating the first and second surfaces, wherein a first conductive pad is formed on an end of each of the conductive through vias exposed from the first surface, and a second conductive pad is formed on the other end of each of the conductive through vias exposed from the second surface and electrically connected to a corresponding one of the first conductive terminals.