APPARATUS FOR PRODUCING FINE PARTICLES AND METHOD FOR PRODUCING FINE PARTICLES

摘要

An apparatus and a method for producing fine particles capable of increasing the production and producing fine particles at low costs by feeding a large quantity of material efficiently into the plasma. The apparatus includes a vacuum chamber, a material feeding device connected to the vacuum chamber and feeding material particles into the vacuum chamber from material feeing ports, a plurality of electrodes connected to the vacuum chamber, tip ends of which protrude into the vacuum chamber to generate plasma and a collecting device connected to the vacuum chamber and collecting fine particles, which generates discharge inside the vacuum chamber and produces the fine particles from the material, in which the material feeding ports of the material feeding device are arranged in a lower side than the plural electrodes in the vertical direction in the vacuum chamber.

主权项

1. An apparatus for producing fine particles comprising:
a vacuum chamber; a material feeding device connected to the vacuum chamber and feeding material particles into the vacuum chamber from material feeding ports; a plurality of electrodes connected to the vacuum chamber, tip ends of which protrude into the vacuum chamber to generate plasma; and a collecting device connected to the vacuum chamber and collecting fine particles, which generates discharge inside the vacuum chamber and produces the fine particles from the material, wherein the material feeding ports of the material feeding device are arranged in a lower side than the plurality of electrodes in the vertical direction in the vacuum chamber.