发明名称 |
POWDER FOR FILM FORMATION AND MATERIAL FOR FILM FORMATION |
摘要 |
This powder for film formation contains an oxyfluoride of a rare earth element (Ln-O-F). The average particle diameter (D50) of this powder is from 0.1 μm to 10 μm (inclusive), and the volume of pores having a diameter of 10 μm or less as determined by a mercury intrusion method is from 0.1 cm3/g to 0.5 cm3/g (inclusive). In an X-ray diffraction measurement of this powder using a Cu-Kα ray or a Cu-Kα1 ray, the ratio of the maximum peak intensity (S0) of an oxide of a rare earth element (LnxOy) as observed within the range of 2θ = 20-40° to the maximum peak intensity (S1) of the oxyfluoride of a rare earth element (Ln-O-F) as observed within the same range, namely S0/S1 is 1.0 or less. |
申请公布号 |
WO2016129457(A1) |
申请公布日期 |
2016.08.18 |
申请号 |
WO2016JP53064 |
申请日期 |
2016.02.02 |
申请人 |
NIPPON YTTRIUM CO., LTD. |
发明人 |
SATO, Ryuichi;FUKAGAWA, Naoki;SHIGEYOSHI, Yuji;MATSUKURA, Kento |
分类号 |
C23C4/04;C23C14/24;C23C14/34;C23C24/08 |
主分类号 |
C23C4/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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