| 摘要 |
PROBLEM TO BE SOLVED: To increase the measurement efficiency of a shape measurement device by reducing the load and the time required for measurement axis alignment.SOLUTION: A calibration gauge with a plane symmetry, which is a master ball 90 as a true sphere, for example, is set at a position other than the center of rotation of a rotation table 220. The calibration gauge 90 is measured while rotating and driving the rotation table 220. A gauge head 330 determines the misalignment of the measurement axis on the basis of the pattern of the phase of the rotation table 220 when the calibration gauge 90 is detected.SELECTED DRAWING: Figure 17 |
