Curved Grating, Method for Manufacturing the Same, and Optical Device

摘要

A technique is provided which enables preparation of a curved grating having a desired curvature, by plastically deforming, along a curved substrate, a flat grating prepared by a semiconductor process on a silicon substrate, and which thus prepares a diffraction grating with high accuracy. A silicon flat grating prepared by a semiconductor process is transferred to an amorphous material, and the amorphous material substrate is curved and mounted on a curved fixed substrate, thus providing a curved grating having a crystalline material in which the generation of a dislocation line is restrained.

主权项

1. A method for manufacturing a curved grating in which a curved grating is prepared by forming a curved grating mold through the following processes (1) to (4) and transferring the mold to a resin substrate:
(1) the process of forming a diffraction pattern on a silicon substrate; (2) the process of superimposing the silicon substrate with the diffraction pattern formed thereon and an amorphous material substrate on each other in such a way that the diffraction pattern faces a face side of the amorphous material substrate, and transferring the diffraction pattern to a main surface of the amorphous material substrate; (3) the process of pressing a curved substrate having a convex curved surface on one main surface against a surface facing the surface of the amorphous material substrate with the diffraction grating transferred thereto while abutting the one main surface side, and thereby curving the amorphous material substrate; and (4) the process of fixing a concave surface facing the one main surface of the curved amorphous material substrate, and a convex curved surface of a fixed substrate having the convex curved surface, and thereby forming a curved grating mold.