发明名称 METHOD FOR PRODUCTION OF TWO AND THREE DIMENSIONAL OBJECTS FROM SOLIDS BY ELECTRON BEAM
摘要 The method for production of two or three-dimensional structures from solid substrate by controlled mass transfer of joined materials by electron beam, when solid substrate is prepared, area for electron beam exposure is defined, electron beam dimensions are defined, acceleration voltage and electron beam is defined, substrate is exposed by at least one electron beam, while exposure time is related to required volume growth of two and three dimensional objects, and electron beam is moving inside repeating scanning pattern of exposed area.
申请公布号 WO2016180383(A1) 申请公布日期 2016.11.17
申请号 WO2016CZ50012 申请日期 2016.05.13
申请人 VYSOKE UCENI TECHNICKE V BRNE 发明人 SALAMON, David;JAN, Vít
分类号 H01J37/305;B23K15/00;G03F7/20 主分类号 H01J37/305
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