| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a target for ion plating for producing a zinc oxide-based thin film which has low surface resistance, in which, even if being heated in an oxygen-containing atmosphere, the rate of a change in the surface resistance is small before and after the heating, and which has excellent heat resistance. <P>SOLUTION: The target for ion plating for producing a zinc oxide-based thin film composed of a sintered body comprising zinc oxide and indium, the ratio of the indium element contained in the sintered body is 0.003 to 30 mass%. When the crystal grain size of the sintered body is observed by a scanning electron microscope, the average crystal grain size is preferably 0.1 to 20 μm. <P>COPYRIGHT: (C)2009,JPO&INPIT |
