发明名称 ADHESIVE SHEET, DICING TAPE-INTEGRATED ADHESIVE SHEET, FILM, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide: an adhesive sheet which can effectively dissipate heat generated in a chip to a lead frame; a dicing tape-integrated adhesive sheet including such an adhesive sheet; and a film.SOLUTION: The present invention relates to an adhesive sheet. When the adhesive sheet of the invention is used to form a device having a lead frame, an adhesion layer disposed on the lead frame, and a silicon chip disposed on the adhesion layer, the interface heat resistance of the adhesion layer and the lead frame is 0.15 K/W or less, and the total heat resistance is 0.55 K/W or less. The total heat resistance is a sum total of the interface heat resistance and the internal heat resistance of the adhesion layer.SELECTED DRAWING: Figure 1
申请公布号 JP2016219720(A) 申请公布日期 2016.12.22
申请号 JP20150106043 申请日期 2015.05.26
申请人 NITTO DENKO CORP 发明人 KIMURA TAKEHIRO;MISUMI SADAHITO;TAKAMOTO HISAHIDE;ONISHI KENJI;SHISHIDO YUICHIRO
分类号 H01L21/52 主分类号 H01L21/52
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