ELECTRON MICROSCOPE AND MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an electron microscope capable of measuring an amount of deflection at the time when an electron beam transmits through a sample, with high sensitivity and high positional resolution.SOLUTION: An electron microscope 100 for measuring an amount of deflection at the time when an electron beam EB transmits through a sample S includes: an electron beam source generating an electron beam EB; an illumination-lens system focusing the electron beam EB to irradiate the sample S; an iris 30 having an electron beam shielding section that shields between a central part EB1 and an outer peripheral part EB2 of an electron beam EB that is incident to the sample S; and a divided detector 20 in which a detection surface 22 for detecting an electron beam EB transmitting through the sample S is divided into a plurality of detection areas.SELECTED DRAWING: Figure 5