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发明名称
Verfahren zum Messen der Schichtdicken einer mehrschichtigen Probe
摘要
申请公布号
DE69408608(T2)
申请公布日期
1998.09.03
申请号
DE19946008608T
申请日期
1994.08.01
申请人
DAINIPPON SCREEN MFG. CO., LTD., KYOTO, JP
发明人
HORIE, MASAHIRO, C/O DAINIPPON SCREEN MFG.CO.LTD., HORIKAWA-DORI, KAMIKYO-KU, KYOTO, JP
分类号
G01B11/06;(IPC1-7):G01B11/06
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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