| 摘要 |
PROBLEM TO BE SOLVED: To obtain the positive radiation sensitive composition high in sensitivity and contrast by incorporating a specified phenol resin. SOLUTION: This positive radiation sensitive composition is composed essentially of a novolak resin obtained by condensing a substituted phenol with an aldehyde compound, and a quinonediazido compound obtained by reaction of a polyphenol compound with a 1,2-naphthoquinonediazido-4-(or -5) sulfonylchloride, and a phenolnovolak resin comprising a unit having 2 nuclei in an amount of 1-10 weight%, and a unit having 3 nuclei in an amount of >=20 weight% unit, and a unit having 4 nuclei in an amount of 5-20 weight%. It is preferred that the weight ratio of the 3-nuclei compd. to the 4-nuclei compd. is 2-15 and the substituted phenol is cresol, and the polyphenol compound is alkylpyrogallol. |
