WAFER DEFECT DETECTION SYSTEM WITH TRAVELING LENS MULTI-BEAM SCANNER,申请号KR20047014887-传众专利搜索

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发明名称	WAFER DEFECT DETECTION SYSTEM WITH TRAVELING LENS MULTI-BEAM SCANNER
摘要
申请公布号	KR20040108679(A)	申请公布日期	2004.12.24
申请号	KR20047014887	申请日期	2003.03.14
申请人		发明人
分类号	G01B11/30;H01L21/66;G01B11/25;G01N21/00;G01N21/89;G01N21/95;G01N21/956	主分类号	G01B11/30
代理机构		代理人
主权项
地址

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