发明名称 |
METHOD OF FABRICATING METAL BUS ELECTRODE OF PLASMA DISPLAY PANEL |
摘要 |
A method for manufacturing a metal bus electrode is provided to simplify manufacturing procedures and reduce manufacturing costs by forming a metal seed layer by electrodeless plating a black metal on the surface of the ITO electrode exposed between the patterned photosensitive resin layers. A method for manufacturing a metal bus electrode comprises a step of forming a metal seed layer(42) on a glass/ITO electrode substrate(41); a step of depositing a photosensitive resin layer on the metal seed layer; a step of patterning the photosensitive resin layer through exposure and development processes; a step of electroplating a metal electrode on the metal seed layer which is exposed between the patterned photosensitive resin layers; a step of removing the photosensitive resin layers; and a step of etching the metal seed layer. The metal seed layer is formed by an electrodeless plating process. |
申请公布号 |
KR20050028377(A) |
申请公布日期 |
2005.03.23 |
申请号 |
KR20030064538 |
申请日期 |
2003.09.17 |
申请人 |
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
JEUNG, WON YOUNG;OH, YOUNG JOO |
分类号 |
H01J9/02;H01J11/22;(IPC1-7):H01J17/49 |
主分类号 |
H01J9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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