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发明名称
METHOD FOR DEPOSITING THIN FILM ON A WAFER AND A THIN FILM STRUCTURE MANUFACTURED BY THE SAME
摘要
申请公布号
KR20050060886(A)
申请公布日期
2005.06.22
申请号
KR20030092617
申请日期
2003.12.17
申请人
INTEGRATED PROCESS SYSTEMS LTD.
发明人
CHANG, HO SEUNG;SEO, TAE WOOK;LEE, SAHNG KYOO;LIM, HONG JOO
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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