| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve safety against leakage of microwave in a plasma generating device which is used in treatment of a workpiece such as reforming of a substrate and propagates microwave from a microwave generating means to plasma generating nozzles by a waveguide. <P>SOLUTION: A great number of plasma generating nozzles 31 are installed on a third waveguide piece 13 of the plasma generating part 30, and due to bending by their weight, there is a possibility of leakage of microwave as a gap is brought about in the flanges 13F1, 13F2 if vibration and shock are added due to an earthquake or work mistakes. By detecting its leakage by microwave antennas A21, A22 and then by detecting leakage of microwave from a transfer entrance 2 and a transfer exit 3 of the workpiece W of a shield case 1, by microwave antennas A11, A12 generation of microwave from the microwave generating device 20 is stopped. <P>COPYRIGHT: (C)2007,JPO&INPIT |
