ANTIREFLECTIVE COATING FOR PHOTORESIST COMPOSITIONS,申请号EP20000948003-传众专利搜索

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发明名称	ANTIREFLECTIVE COATING FOR PHOTORESIST COMPOSITIONS
摘要
申请公布号	EP1210651(B1)	申请公布日期	2009.03.04
申请号	EP20000948003	申请日期	2000.07.27
申请人	AZ ELECTRONIC MATERIALS USA CORP.	发明人	DING, SHUJI;KHANNA, DINESH, N.;SPAK, MARK, A.;DURHAM, DANA, L.;SHAN, JIANHUI;GONZALEZ, ELEAZAR
分类号	G03F7/09;C08F20/36;G03F7/004;C08F220/30;C09B69/10;C09D5/00;C09D201/00;H01L21/027	主分类号	G03F7/09
代理机构		代理人
主权项
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