发明名称 LIGHT TRANSMITTING REGION FOR POLISHING PAD AND MANUFACTURING METHOD THEREOF
摘要 The objective of the present invention is to provide a method of stably producing, in large volume, a light transmitting region that has a desired light transmissivity in a desired wavelength. This manufacturing method of a light transmitting region formed of a thermosetting polyurethane resin includes: a step for obtaining, beforehand, a correlation between a molding temperature when the light transmitting region is created by a sheet molding technique and the light transmissivity of the obtained light transmitting region in a specific wavelength; and a step for adjusting the molding temperature when the light transmitting region is created by the sheet molding technique on the basis of the obtained correlation to adjust the light transmissivity of the light transmitting region in the specific wavelength to the desired light transmissivity.
申请公布号 WO2016098500(A1) 申请公布日期 2016.06.23
申请号 WO2015JP82005 申请日期 2015.11.13
申请人 ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC. 发明人 SHIMIZU, SHINJI
分类号 B24B37/24;H01L21/304 主分类号 B24B37/24
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