GRATING, METHOD FOR MANUFACTURING GRATING, AND METHOD FOR REPRODUCING GRATING

摘要

A grating for narrowing the band of a laser beam, the wavelength of which is in the vacuum ultraviolet region and which is output from a laser device. Said grating may include: a grating substrate; a first aluminium metal film which is formed on the grating substrate and has a grooved shape on the surface thereof; and a first protective film formed on the first aluminium metal film by the ALD method.