发明名称 COMPOSITION AND METHOD FOR MICRO ETCHING OF COPPER AND COPPER ALLOYS
摘要 The present invention is related to a composition for micro etching of a copper or a copper alloy surface, wherein the composition comprises i) at least a source of Fe3+ ions, ii) at least a source of Br - ions, iii) at least an inorganic acid, and iv) at least one etch refiner according to formula (I) wherein R1 is selected from the group consisting of hydrogen, C1-C5-alkyl or a substituted aryl or alkaryl group; R2 is selected from the group consisting of hydrogen, C1-C5-alkyl or C1-C5-alkoxy; R3, R4 are selected from the group consisting of hydrogen and C1-C5-alkyl; and X- is a suitable anion. Further, the present invention is directed to a method for micro etching of copper or copper alloy surfaces using such a composition.
申请公布号 WO2016096228(A1) 申请公布日期 2016.06.23
申请号 WO2015EP75310 申请日期 2015.10.30
申请人 ATOTECH DEUTSCHLAND GMBH 发明人 LAGER, MARKKU;CLICQUE, ARNO;TEWS, DIRK
分类号 C23F1/18;H05K3/06;H05K3/38 主分类号 C23F1/18
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