Method for producing SiC single crystal

摘要

Provided is a method for producing an SiC single crystal, which is capable of greatly increasing the growth rate in a solution technique in comparison to conventional methods. A method for producing an SiC single crystal, wherein an SiC single crystal is grown by bringing a seed crystal substrate into contact with an Si—C solution that is put in a crucible and has a temperature gradient decreasing from the inside to the liquid level, and wherein the value of depth/inner diameter of the crucible is less than 1.71 and the temperature gradient of the Si—C solution from the liquid level to 10 mm below the liquid level is larger than 42° C./cm.

主权项

1. A method for producing a SiC single crystal in which a seed crystal substrate is contacted with a Si—C solution that is placed in a crucible and has a temperature gradient such that the temperature decreases from the interior toward the liquid surface level to cause crystal growth of the SiC single crystal, wherein:
the crucible has a cover at the top of the crucible and the depth/inner diameter ratio of the crucible is less than 1.71, the side wall of the crucible is heated by a heater situated surrounding the crucible, and the temperature gradient in the range from the liquid surface level of the Si—C solution to 10 mm below the liquid surface level is greater than 47° C./cm.