| 摘要 |
In a method for the processing of a workpiece, in particular the surface processing, in which a laser beam is focused on the workpiece and an additional gas jet is directed at the focus of the laser beam, the workpiece is, according to the invention electrostatically charged up. This suppresses renewed deposition of the evaporated material on the workpiece surface. The gas jet is composed of inert and/or reactive gas. The electrostatic forces acting on the material removed are intensified by the use of an annular electrode with an electrostatic charge opposite to that of the workpiece. An attractive force due to the opposite charge of the evaporated material and the annular electrode is added to the repulsive force due to the same charge of the evaporated material and workpiece. <IMAGE> |
