发明名称 Method of manufacturing semiconductor devices
摘要 A method of manufacturing a semiconductor device including forming a dummy gate electrode which is divided into first and second areas, selectively implanting N-type ions and P-type ions into the first and second areas of the dummy gate electrode respectively and then implanting impurity ions into a boundary region between the first area and second area of the dummy gate electrode.
申请公布号 US7556998(B2) 申请公布日期 2009.07.07
申请号 US20050319489 申请日期 2005.12.29
申请人 DONGBU ELECTRONICS, CO., LTD. 发明人 PARK HYUK;KEUM DONG YEOL
分类号 H01L21/8238 主分类号 H01L21/8238
代理机构 代理人
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