发明名称 Method and device for manufacturing a thin film and magnetic recording medium
摘要 A method and a device for manufacturing a thin film by a vacuum deposition method, and a magnetic recording medium produced thereby are disclosed. A thin film of high quality is mass-produced while introducing reaction gas to a thin film forming section from a nozzle consisting of minute tubes, so that the flow of evaporated atoms is not disturbed by the reaction gas.
申请公布号 US5985423(A) 申请公布日期 1999.11.16
申请号 US19980004364 申请日期 1998.01.08
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 HONDA, KAZUYOSHI;MAEZAWA, YOSHIHARU;ODAGIRI, MASARU;OKAZAKI, SADAYUKI
分类号 C23C14/08;C23C14/00;C23C14/56;G11B5/64;G11B5/65;G11B5/66;G11B5/85;G11B5/851;(IPC1-7):G11B5/66 主分类号 C23C14/08
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