发明名称 |
Method and device for manufacturing a thin film and magnetic recording medium |
摘要 |
A method and a device for manufacturing a thin film by a vacuum deposition method, and a magnetic recording medium produced thereby are disclosed. A thin film of high quality is mass-produced while introducing reaction gas to a thin film forming section from a nozzle consisting of minute tubes, so that the flow of evaporated atoms is not disturbed by the reaction gas.
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申请公布号 |
US5985423(A) |
申请公布日期 |
1999.11.16 |
申请号 |
US19980004364 |
申请日期 |
1998.01.08 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
HONDA, KAZUYOSHI;MAEZAWA, YOSHIHARU;ODAGIRI, MASARU;OKAZAKI, SADAYUKI |
分类号 |
C23C14/08;C23C14/00;C23C14/56;G11B5/64;G11B5/65;G11B5/66;G11B5/85;G11B5/851;(IPC1-7):G11B5/66 |
主分类号 |
C23C14/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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